Textures of Ta/Al multilayer films
Yuan, X. Y. ; Wu, Z. Q. ; Hu, A. ; Jiang, S. S. ; Qiu, Y. ; Khatanova, N. A. ; Ilyushin, R. S.
[S.l.] : American Institute of Physics (AIP)
Published 1993
[S.l.] : American Institute of Physics (AIP)
Published 1993
| ISSN: |
1089-7550
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|---|---|
| Source: |
AIP Digital Archive
|
| Topics: |
Physics
|
| Notes: |
Ta/Al multilayer films with a modulation wavelength of 7.0 nm were grown using magnetron sputtering. The Bragg θ-2θ scan pattern and the plate film photograph of x-ray diffraction reveal that the sample has Ta(110) and A1(111) axial textures with a mosaic spread of about ±5° and coherency strains. The structure change of the multilayer sample after annealing at 550 °C for 2 h is determined by the plate film photography of x-ray diffraction to study the thermal stability. It is found that after annealing a large amount of Ta and Al atoms at the interfaces are combined into TaAl3 with [(202)+(002)] textures.
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| Type of Medium: |
Electronic Resource
|
| URL: |
| _version_ | 1798289657718374400 |
|---|---|
| autor | Yuan, X. Y. Wu, Z. Q. Hu, A. Jiang, S. S. Qiu, Y. Khatanova, N. A. Ilyushin, R. S. |
| autorsonst | Yuan, X. Y. Wu, Z. Q. Hu, A. Jiang, S. S. Qiu, Y. Khatanova, N. A. Ilyushin, R. S. |
| book_url | http://dx.doi.org/10.1063/1.352890 |
| datenlieferant | nat_lic_papers |
| hauptsatz | hsatz_simple |
| identnr | NLZ218591462 |
| issn | 1089-7550 |
| journal_name | Journal of Applied Physics |
| materialart | 1 |
| notes | Ta/Al multilayer films with a modulation wavelength of 7.0 nm were grown using magnetron sputtering. The Bragg θ-2θ scan pattern and the plate film photograph of x-ray diffraction reveal that the sample has Ta(110) and A1(111) axial textures with a mosaic spread of about ±5° and coherency strains. The structure change of the multilayer sample after annealing at 550 °C for 2 h is determined by the plate film photography of x-ray diffraction to study the thermal stability. It is found that after annealing a large amount of Ta and Al atoms at the interfaces are combined into TaAl3 with [(202)+(002)] textures. |
| package_name | American Institute of Physics (AIP) |
| publikationsjahr_anzeige | 1993 |
| publikationsjahr_facette | 1993 |
| publikationsjahr_intervall | 8009:1990-1994 |
| publikationsjahr_sort | 1993 |
| publikationsort | [S.l.] |
| publisher | American Institute of Physics (AIP) |
| reference | 73 (1993), S. 3827-3829 |
| search_space | articles |
| shingle_author_1 | Yuan, X. Y. Wu, Z. Q. Hu, A. Jiang, S. S. Qiu, Y. Khatanova, N. A. Ilyushin, R. S. |
| shingle_author_2 | Yuan, X. Y. Wu, Z. Q. Hu, A. Jiang, S. S. Qiu, Y. Khatanova, N. A. Ilyushin, R. S. |
| shingle_author_3 | Yuan, X. Y. Wu, Z. Q. Hu, A. Jiang, S. S. Qiu, Y. Khatanova, N. A. Ilyushin, R. S. |
| shingle_author_4 | Yuan, X. Y. Wu, Z. Q. Hu, A. Jiang, S. S. Qiu, Y. Khatanova, N. A. Ilyushin, R. S. |
| shingle_catch_all_1 | Yuan, X. Y. Wu, Z. Q. Hu, A. Jiang, S. S. Qiu, Y. Khatanova, N. A. Ilyushin, R. S. Textures of Ta/Al multilayer films Ta/Al multilayer films with a modulation wavelength of 7.0 nm were grown using magnetron sputtering. The Bragg θ-2θ scan pattern and the plate film photograph of x-ray diffraction reveal that the sample has Ta(110) and A1(111) axial textures with a mosaic spread of about ±5° and coherency strains. The structure change of the multilayer sample after annealing at 550 °C for 2 h is determined by the plate film photography of x-ray diffraction to study the thermal stability. It is found that after annealing a large amount of Ta and Al atoms at the interfaces are combined into TaAl3 with [(202)+(002)] textures. 1089-7550 10897550 American Institute of Physics (AIP) |
| shingle_catch_all_2 | Yuan, X. Y. Wu, Z. Q. Hu, A. Jiang, S. S. Qiu, Y. Khatanova, N. A. Ilyushin, R. S. Textures of Ta/Al multilayer films Ta/Al multilayer films with a modulation wavelength of 7.0 nm were grown using magnetron sputtering. The Bragg θ-2θ scan pattern and the plate film photograph of x-ray diffraction reveal that the sample has Ta(110) and A1(111) axial textures with a mosaic spread of about ±5° and coherency strains. The structure change of the multilayer sample after annealing at 550 °C for 2 h is determined by the plate film photography of x-ray diffraction to study the thermal stability. It is found that after annealing a large amount of Ta and Al atoms at the interfaces are combined into TaAl3 with [(202)+(002)] textures. 1089-7550 10897550 American Institute of Physics (AIP) |
| shingle_catch_all_3 | Yuan, X. Y. Wu, Z. Q. Hu, A. Jiang, S. S. Qiu, Y. Khatanova, N. A. Ilyushin, R. S. Textures of Ta/Al multilayer films Ta/Al multilayer films with a modulation wavelength of 7.0 nm were grown using magnetron sputtering. The Bragg θ-2θ scan pattern and the plate film photograph of x-ray diffraction reveal that the sample has Ta(110) and A1(111) axial textures with a mosaic spread of about ±5° and coherency strains. The structure change of the multilayer sample after annealing at 550 °C for 2 h is determined by the plate film photography of x-ray diffraction to study the thermal stability. It is found that after annealing a large amount of Ta and Al atoms at the interfaces are combined into TaAl3 with [(202)+(002)] textures. 1089-7550 10897550 American Institute of Physics (AIP) |
| shingle_catch_all_4 | Yuan, X. Y. Wu, Z. Q. Hu, A. Jiang, S. S. Qiu, Y. Khatanova, N. A. Ilyushin, R. S. Textures of Ta/Al multilayer films Ta/Al multilayer films with a modulation wavelength of 7.0 nm were grown using magnetron sputtering. The Bragg θ-2θ scan pattern and the plate film photograph of x-ray diffraction reveal that the sample has Ta(110) and A1(111) axial textures with a mosaic spread of about ±5° and coherency strains. The structure change of the multilayer sample after annealing at 550 °C for 2 h is determined by the plate film photography of x-ray diffraction to study the thermal stability. It is found that after annealing a large amount of Ta and Al atoms at the interfaces are combined into TaAl3 with [(202)+(002)] textures. 1089-7550 10897550 American Institute of Physics (AIP) |
| shingle_title_1 | Textures of Ta/Al multilayer films |
| shingle_title_2 | Textures of Ta/Al multilayer films |
| shingle_title_3 | Textures of Ta/Al multilayer films |
| shingle_title_4 | Textures of Ta/Al multilayer films |
| sigel_instance_filter | dkfz geomar wilbert ipn albert |
| source_archive | AIP Digital Archive |
| timestamp | 2024-05-06T08:04:18.635Z |
| titel | Textures of Ta/Al multilayer films |
| titel_suche | Textures of Ta/Al multilayer films |
| topic | U |
| uid | nat_lic_papers_NLZ218591462 |