Textures of Ta/Al multilayer films
Yuan, X. Y. ; Wu, Z. Q. ; Hu, A. ; Jiang, S. S. ; Qiu, Y. ; Khatanova, N. A. ; Ilyushin, R. S.
[S.l.] : American Institute of Physics (AIP)
Published 1993
[S.l.] : American Institute of Physics (AIP)
Published 1993
| ISSN: |
1089-7550
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|---|---|
| Source: |
AIP Digital Archive
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| Topics: |
Physics
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| Notes: |
Ta/Al multilayer films with a modulation wavelength of 7.0 nm were grown using magnetron sputtering. The Bragg θ-2θ scan pattern and the plate film photograph of x-ray diffraction reveal that the sample has Ta(110) and A1(111) axial textures with a mosaic spread of about ±5° and coherency strains. The structure change of the multilayer sample after annealing at 550 °C for 2 h is determined by the plate film photography of x-ray diffraction to study the thermal stability. It is found that after annealing a large amount of Ta and Al atoms at the interfaces are combined into TaAl3 with [(202)+(002)] textures.
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| Type of Medium: |
Electronic Resource
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| URL: |