Activation energy for the photoluminescence W center in silicon

Schultz, Peter J. ; Thompson, T. D. ; Elliman, R. G.

Woodbury, NY : American Institute of Physics (AIP)
Published 1992
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
This work presents a systematic study of the substrate temperature dependence for the formation of the photoluminescent W center during high energy self-ion irradiation of silicon. All previous studies of this center were for postirradiation annealing, and we show that the formation is well described by a thermally activated process involving both the release of point defects from secondary defect complexes and the rate-limited activation of the center itself. We deduce an activation energy of Ea∼0.85 eV for the growth of the W center, and discuss the relationship of this type of experiment to conventional annealing studies.
Type of Medium:
Electronic Resource
URL:
_version_ 1798289627005583360
autor Schultz, Peter J.
Thompson, T. D.
Elliman, R. G.
autorsonst Schultz, Peter J.
Thompson, T. D.
Elliman, R. G.
book_url http://dx.doi.org/10.1063/1.107373
datenlieferant nat_lic_papers
hauptsatz hsatz_simple
identnr NLZ218256213
issn 1077-3118
journal_name Applied Physics Letters
materialart 1
notes This work presents a systematic study of the substrate temperature dependence for the formation of the photoluminescent W center during high energy self-ion irradiation of silicon. All previous studies of this center were for postirradiation annealing, and we show that the formation is well described by a thermally activated process involving both the release of point defects from secondary defect complexes and the rate-limited activation of the center itself. We deduce an activation energy of Ea∼0.85 eV for the growth of the W center, and discuss the relationship of this type of experiment to conventional annealing studies.
package_name American Institute of Physics (AIP)
publikationsjahr_anzeige 1992
publikationsjahr_facette 1992
publikationsjahr_intervall 8009:1990-1994
publikationsjahr_sort 1992
publikationsort Woodbury, NY
publisher American Institute of Physics (AIP)
reference 60 (1992), S. 59-61
search_space articles
shingle_author_1 Schultz, Peter J.
Thompson, T. D.
Elliman, R. G.
shingle_author_2 Schultz, Peter J.
Thompson, T. D.
Elliman, R. G.
shingle_author_3 Schultz, Peter J.
Thompson, T. D.
Elliman, R. G.
shingle_author_4 Schultz, Peter J.
Thompson, T. D.
Elliman, R. G.
shingle_catch_all_1 Schultz, Peter J.
Thompson, T. D.
Elliman, R. G.
Activation energy for the photoluminescence W center in silicon
This work presents a systematic study of the substrate temperature dependence for the formation of the photoluminescent W center during high energy self-ion irradiation of silicon. All previous studies of this center were for postirradiation annealing, and we show that the formation is well described by a thermally activated process involving both the release of point defects from secondary defect complexes and the rate-limited activation of the center itself. We deduce an activation energy of Ea∼0.85 eV for the growth of the W center, and discuss the relationship of this type of experiment to conventional annealing studies.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_catch_all_2 Schultz, Peter J.
Thompson, T. D.
Elliman, R. G.
Activation energy for the photoluminescence W center in silicon
This work presents a systematic study of the substrate temperature dependence for the formation of the photoluminescent W center during high energy self-ion irradiation of silicon. All previous studies of this center were for postirradiation annealing, and we show that the formation is well described by a thermally activated process involving both the release of point defects from secondary defect complexes and the rate-limited activation of the center itself. We deduce an activation energy of Ea∼0.85 eV for the growth of the W center, and discuss the relationship of this type of experiment to conventional annealing studies.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_catch_all_3 Schultz, Peter J.
Thompson, T. D.
Elliman, R. G.
Activation energy for the photoluminescence W center in silicon
This work presents a systematic study of the substrate temperature dependence for the formation of the photoluminescent W center during high energy self-ion irradiation of silicon. All previous studies of this center were for postirradiation annealing, and we show that the formation is well described by a thermally activated process involving both the release of point defects from secondary defect complexes and the rate-limited activation of the center itself. We deduce an activation energy of Ea∼0.85 eV for the growth of the W center, and discuss the relationship of this type of experiment to conventional annealing studies.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_catch_all_4 Schultz, Peter J.
Thompson, T. D.
Elliman, R. G.
Activation energy for the photoluminescence W center in silicon
This work presents a systematic study of the substrate temperature dependence for the formation of the photoluminescent W center during high energy self-ion irradiation of silicon. All previous studies of this center were for postirradiation annealing, and we show that the formation is well described by a thermally activated process involving both the release of point defects from secondary defect complexes and the rate-limited activation of the center itself. We deduce an activation energy of Ea∼0.85 eV for the growth of the W center, and discuss the relationship of this type of experiment to conventional annealing studies.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_title_1 Activation energy for the photoluminescence W center in silicon
shingle_title_2 Activation energy for the photoluminescence W center in silicon
shingle_title_3 Activation energy for the photoluminescence W center in silicon
shingle_title_4 Activation energy for the photoluminescence W center in silicon
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wilbert
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source_archive AIP Digital Archive
timestamp 2024-05-06T08:03:50.301Z
titel Activation energy for the photoluminescence W center in silicon
titel_suche Activation energy for the photoluminescence W center in silicon
topic U
uid nat_lic_papers_NLZ218256213