Focused nanoparticle-beam deposition of patterned microstructures

Di Fonzo, F. ; Gidwani, A. ; Fan, M. H. ; Neumann, D. ; Iordanoglou, D. I. ; Heberlein, J. V. R. ; McMurry, P. H. ; Girshick, S. L.

Woodbury, NY : American Institute of Physics (AIP)
Published 2000
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A method was developed for fabricating nanocrystalline microstructures. This method involves synthesizing nanoparticles in a thermal plasma expanded through a nozzle, and then focusing the nanoparticles to a collimated beam by means of aerodynamic lenses. High-aspect-ratio structures of silicon carbide and titanium were deposited on stationary substrates, and lines and two-dimensional patterns were deposited on translated substrates. Linewidths equalled approximately 50 μm. This approach allows the use of much larger nozzles than in previously developed micronozzle methods, and also allows size selection of the particles that are deposited. © 2000 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
_version_ 1798289602429059072
autor Di Fonzo, F.
Gidwani, A.
Fan, M. H.
Neumann, D.
Iordanoglou, D. I.
Heberlein, J. V. R.
McMurry, P. H.
Girshick, S. L.
autorsonst Di Fonzo, F.
Gidwani, A.
Fan, M. H.
Neumann, D.
Iordanoglou, D. I.
Heberlein, J. V. R.
McMurry, P. H.
Girshick, S. L.
book_url http://dx.doi.org/10.1063/1.1306638
datenlieferant nat_lic_papers
hauptsatz hsatz_simple
identnr NLZ218040032
issn 1077-3118
journal_name Applied Physics Letters
materialart 1
notes A method was developed for fabricating nanocrystalline microstructures. This method involves synthesizing nanoparticles in a thermal plasma expanded through a nozzle, and then focusing the nanoparticles to a collimated beam by means of aerodynamic lenses. High-aspect-ratio structures of silicon carbide and titanium were deposited on stationary substrates, and lines and two-dimensional patterns were deposited on translated substrates. Linewidths equalled approximately 50 μm. This approach allows the use of much larger nozzles than in previously developed micronozzle methods, and also allows size selection of the particles that are deposited. © 2000 American Institute of Physics.
package_name American Institute of Physics (AIP)
publikationsjahr_anzeige 2000
publikationsjahr_facette 2000
publikationsjahr_intervall 7999:2000-2004
publikationsjahr_sort 2000
publikationsort Woodbury, NY
publisher American Institute of Physics (AIP)
reference 77 (2000), S. 910-912
search_space articles
shingle_author_1 Di Fonzo, F.
Gidwani, A.
Fan, M. H.
Neumann, D.
Iordanoglou, D. I.
Heberlein, J. V. R.
McMurry, P. H.
Girshick, S. L.
shingle_author_2 Di Fonzo, F.
Gidwani, A.
Fan, M. H.
Neumann, D.
Iordanoglou, D. I.
Heberlein, J. V. R.
McMurry, P. H.
Girshick, S. L.
shingle_author_3 Di Fonzo, F.
Gidwani, A.
Fan, M. H.
Neumann, D.
Iordanoglou, D. I.
Heberlein, J. V. R.
McMurry, P. H.
Girshick, S. L.
shingle_author_4 Di Fonzo, F.
Gidwani, A.
Fan, M. H.
Neumann, D.
Iordanoglou, D. I.
Heberlein, J. V. R.
McMurry, P. H.
Girshick, S. L.
shingle_catch_all_1 Di Fonzo, F.
Gidwani, A.
Fan, M. H.
Neumann, D.
Iordanoglou, D. I.
Heberlein, J. V. R.
McMurry, P. H.
Girshick, S. L.
Focused nanoparticle-beam deposition of patterned microstructures
A method was developed for fabricating nanocrystalline microstructures. This method involves synthesizing nanoparticles in a thermal plasma expanded through a nozzle, and then focusing the nanoparticles to a collimated beam by means of aerodynamic lenses. High-aspect-ratio structures of silicon carbide and titanium were deposited on stationary substrates, and lines and two-dimensional patterns were deposited on translated substrates. Linewidths equalled approximately 50 μm. This approach allows the use of much larger nozzles than in previously developed micronozzle methods, and also allows size selection of the particles that are deposited. © 2000 American Institute of Physics.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_catch_all_2 Di Fonzo, F.
Gidwani, A.
Fan, M. H.
Neumann, D.
Iordanoglou, D. I.
Heberlein, J. V. R.
McMurry, P. H.
Girshick, S. L.
Focused nanoparticle-beam deposition of patterned microstructures
A method was developed for fabricating nanocrystalline microstructures. This method involves synthesizing nanoparticles in a thermal plasma expanded through a nozzle, and then focusing the nanoparticles to a collimated beam by means of aerodynamic lenses. High-aspect-ratio structures of silicon carbide and titanium were deposited on stationary substrates, and lines and two-dimensional patterns were deposited on translated substrates. Linewidths equalled approximately 50 μm. This approach allows the use of much larger nozzles than in previously developed micronozzle methods, and also allows size selection of the particles that are deposited. © 2000 American Institute of Physics.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_catch_all_3 Di Fonzo, F.
Gidwani, A.
Fan, M. H.
Neumann, D.
Iordanoglou, D. I.
Heberlein, J. V. R.
McMurry, P. H.
Girshick, S. L.
Focused nanoparticle-beam deposition of patterned microstructures
A method was developed for fabricating nanocrystalline microstructures. This method involves synthesizing nanoparticles in a thermal plasma expanded through a nozzle, and then focusing the nanoparticles to a collimated beam by means of aerodynamic lenses. High-aspect-ratio structures of silicon carbide and titanium were deposited on stationary substrates, and lines and two-dimensional patterns were deposited on translated substrates. Linewidths equalled approximately 50 μm. This approach allows the use of much larger nozzles than in previously developed micronozzle methods, and also allows size selection of the particles that are deposited. © 2000 American Institute of Physics.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_catch_all_4 Di Fonzo, F.
Gidwani, A.
Fan, M. H.
Neumann, D.
Iordanoglou, D. I.
Heberlein, J. V. R.
McMurry, P. H.
Girshick, S. L.
Focused nanoparticle-beam deposition of patterned microstructures
A method was developed for fabricating nanocrystalline microstructures. This method involves synthesizing nanoparticles in a thermal plasma expanded through a nozzle, and then focusing the nanoparticles to a collimated beam by means of aerodynamic lenses. High-aspect-ratio structures of silicon carbide and titanium were deposited on stationary substrates, and lines and two-dimensional patterns were deposited on translated substrates. Linewidths equalled approximately 50 μm. This approach allows the use of much larger nozzles than in previously developed micronozzle methods, and also allows size selection of the particles that are deposited. © 2000 American Institute of Physics.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_title_1 Focused nanoparticle-beam deposition of patterned microstructures
shingle_title_2 Focused nanoparticle-beam deposition of patterned microstructures
shingle_title_3 Focused nanoparticle-beam deposition of patterned microstructures
shingle_title_4 Focused nanoparticle-beam deposition of patterned microstructures
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timestamp 2024-05-06T08:03:27.105Z
titel Focused nanoparticle-beam deposition of patterned microstructures
titel_suche Focused nanoparticle-beam deposition of patterned microstructures
topic U
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