Ion treatment of silicon in a glow discharge

Sokolowski, M. ; Sokolowska, A. ; Rolinski, E. ; Michalski, A.

Amsterdam : Elsevier

ISSN:	0040-6090
Source:	Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:	Physics
Type of Medium:	Electronic Resource
URL:	http://linkinghub.elsevier.com/retrieve/pii/0040-6090(75)90301-6