Sharp, vertical-walled tips for SFM imaging of steep or soft samples
| ISSN: |
0304-3991
|
|---|---|
| Source: |
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
|
| Topics: |
Electrical Engineering, Measurement and Control Technology
Natural Sciences in General
Physics
|
| Type of Medium: |
Electronic Resource
|
| URL: |
| _version_ | 1798291809680490496 |
|---|---|
| autor | Keller, D. Deputy, D. Alduino, A. Luo, K. |
| autorsonst | Keller, D. Deputy, D. Alduino, A. Luo, K. |
| book_url | http://linkinghub.elsevier.com/retrieve/pii/0304-3991(92)90470-5 |
| datenlieferant | nat_lic_papers |
| fussnote | For samples with steep-walled features, for example semiconductors devices and mammalian cells, the STM or SFM will produce faithful images only if the probe tip is very sharp, that is, if the end radius of curvature and the opening angle are small. Sharp tips are also less strongly attracted to the sample surface by van der Waals interactions, and so can be operated at smaller net force. This is important for soft samples or samples that are not well anchored to the substrate, i.e., biological molecules. Two methods are described by which essentially cylindrical, vertical-walled tips can be made. In the first method a long thin ''flagpole'' is carved from a tungsten STM tip by a beam of focused gallium ions. In the second method a focused electron beam is used to deposit tall thin spikes of hard carbon on commercial silicon-nitride SFM cantilevers. SFM images of steep-walled grating structures made using e-beam tips show the correct dimensions and sidewall angles, in sharp contrast to the distorted images that result when standard commercial tips are used. The e-beam method can also be used to create hooked tips with well-defined geometry for imaging undercut structures. |
| hauptsatz | hsatz_simple |
| identnr | NLZ178327522 |
| issn | 0304-3991 |
| journal_name | Ultramicroscopy |
| materialart | 1 |
| package_name | Elsevier |
| publikationsort | Amsterdam |
| publisher | Elsevier |
| reference | 42-44 (1992), S. 1481-1489 |
| search_space | articles |
| shingle_author_1 | Keller, D. Deputy, D. Alduino, A. Luo, K. |
| shingle_author_2 | Keller, D. Deputy, D. Alduino, A. Luo, K. |
| shingle_author_3 | Keller, D. Deputy, D. Alduino, A. Luo, K. |
| shingle_author_4 | Keller, D. Deputy, D. Alduino, A. Luo, K. |
| shingle_catch_all_1 | Keller, D. Deputy, D. Alduino, A. Luo, K. Sharp, vertical-walled tips for SFM imaging of steep or soft samples 0304-3991 03043991 Elsevier |
| shingle_catch_all_2 | Keller, D. Deputy, D. Alduino, A. Luo, K. Sharp, vertical-walled tips for SFM imaging of steep or soft samples 0304-3991 03043991 Elsevier |
| shingle_catch_all_3 | Keller, D. Deputy, D. Alduino, A. Luo, K. Sharp, vertical-walled tips for SFM imaging of steep or soft samples 0304-3991 03043991 Elsevier |
| shingle_catch_all_4 | Keller, D. Deputy, D. Alduino, A. Luo, K. Sharp, vertical-walled tips for SFM imaging of steep or soft samples 0304-3991 03043991 Elsevier |
| shingle_title_1 | Sharp, vertical-walled tips for SFM imaging of steep or soft samples |
| shingle_title_2 | Sharp, vertical-walled tips for SFM imaging of steep or soft samples |
| shingle_title_3 | Sharp, vertical-walled tips for SFM imaging of steep or soft samples |
| shingle_title_4 | Sharp, vertical-walled tips for SFM imaging of steep or soft samples |
| sigel_instance_filter | dkfz geomar wilbert ipn albert fhp |
| source_archive | Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 |
| timestamp | 2024-05-06T08:38:31.526Z |
| titel | Sharp, vertical-walled tips for SFM imaging of steep or soft samples |
| titel_suche | Sharp, vertical-walled tips for SFM imaging of steep or soft samples For samples with steep-walled features, for example semiconductors devices and mammalian cells, the STM or SFM will produce faithful images only if the probe tip is very sharp, that is, if the end radius of curvature and the opening angle are small. Sharp tips are also less strongly attracted to the sample surface by van der Waals interactions, and so can be operated at smaller net force. This is important for soft samples or samples that are not well anchored to the substrate, i.e., biological molecules. Two methods are described by which essentially cylindrical, vertical-walled tips can be made. In the first method a long thin ''flagpole'' is carved from a tungsten STM tip by a beam of focused gallium ions. In the second method a focused electron beam is used to deposit tall thin spikes of hard carbon on commercial silicon-nitride SFM cantilevers. SFM images of steep-walled grating structures made using e-beam tips show the correct dimensions and sidewall angles, in sharp contrast to the distorted images that result when standard commercial tips are used. The e-beam method can also be used to create hooked tips with well-defined geometry for imaging undercut structures. |
| topic | ZN TA-TD U |
| uid | nat_lic_papers_NLZ178327522 |