Micromachining of polyimide films with focused ion beams

Steckl, A.J. ; Balakrishnan, S. ; Jin, H.-S. ; Corelli, J.C.

Amsterdam : Elsevier

ISSN:	0167-9317
Source:	Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:	Electrical Engineering, Measurement and Control Technology
Type of Medium:	Electronic Resource
URL:	http://linkinghub.elsevier.com/retrieve/pii/0167-9317(86)90077-8