APA (7th ed.) Citation

Steckl, A., Balakrishnan, S., Jin, H., & Corelli, J. Micromachining of polyimide films with focused ion beams. Elsevier.

Chicago Style (17th ed.) Citation

Steckl, A.J, S. Balakrishnan, H.-S Jin, and J.C Corelli. Micromachining of Polyimide Films with Focused Ion Beams. Amsterdam: Elsevier.

MLA (9th ed.) Citation

Steckl, A.J, et al. Micromachining of Polyimide Films with Focused Ion Beams. Elsevier.