Quantum-chemical approach to the elementary steps of plasma etching

Fricke, D.K. ; Muller, H. ; Opitz, C.

Amsterdam : Elsevier

ISSN:	0009-2614
Source:	Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:	Chemistry and Pharmacology Physics
Type of Medium:	Electronic Resource
URL:	http://linkinghub.elsevier.com/retrieve/pii/0009-2614(83)80759-3