Radio Frequency Sputter Deposition of Ga and F Co-Doped ZnO Thin Films: Effects of Substrate Temperature

F H Wang, H S Jhuang, H W Liu and T K Kang
Institute of Physics (IOP)
Published 2018
Publication Date:
2018-08-17
Publisher:
Institute of Physics (IOP)
Print ISSN:
1757-8981
Electronic ISSN:
1757-899X
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
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