High-precision low-cost quartz-crystal thin-film monitor with temperature control
| ISSN: |
1089-7623
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|---|---|
| Source: |
AIP Digital Archive
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| Topics: |
Physics
Electrical Engineering, Measurement and Control Technology
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| Notes: |
An accurate thin-film thickness monitor capable of a resolution of at least 0.01 nm is described. The errors arising from the temperature dependence of the crystal resonant frequency are minimized by heating a closely matched reference crystal until their temperatures are equalized; and by subtracting their frequencies of oscillations. These functions are performed by simple electronic devices.
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| Type of Medium: |
Electronic Resource
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| URL: |