High-precision low-cost quartz-crystal thin-film monitor with temperature control

Kremer, G. ; Moraga, L. A.

[S.l.] : American Institute of Physics (AIP)
Published 1985
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
Electrical Engineering, Measurement and Control Technology
Notes:
An accurate thin-film thickness monitor capable of a resolution of at least 0.01 nm is described. The errors arising from the temperature dependence of the crystal resonant frequency are minimized by heating a closely matched reference crystal until their temperatures are equalized; and by subtracting their frequencies of oscillations. These functions are performed by simple electronic devices.
Type of Medium:
Electronic Resource
URL: