A new system for two-dimensional analysis of hydrogen on solid surfaces
| ISSN: |
1089-7623
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| Source: |
AIP Digital Archive
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| Topics: |
Physics
Electrical Engineering, Measurement and Control Technology
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| Notes: |
This article reports the development of a two-dimensional analyzer, which enables us to observe the distribution of hydrogen on surfaces. A micro-focused electron beam with low primary electron energy (〈1 keV) is scanned over a sample surface, in conjunction with a time-of-flight type electron-stimulated desorption spectroscope, to obtain clear H+ ion images of a specimen surface. A line scan analysis of H+ ions on an integrated circuit and a scanning electron-stimulated desorption image of H+ ions on a Cu mesh are presented as demonstrations. © 1997 American Institute of Physics.
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| Type of Medium: |
Electronic Resource
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| URL: |