Effect of discharge microwave frequency on electron temperature of electron cyclotron resonance plasma
Kawai, Y. ; Suzuki, T. ; Saburi, T. ; Fujii, Y.
[S.l.] : American Institute of Physics (AIP)
Published 2001
[S.l.] : American Institute of Physics (AIP)
Published 2001
| ISSN: |
1089-7623
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|---|---|
| Source: |
AIP Digital Archive
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| Topics: |
Physics
Electrical Engineering, Measurement and Control Technology
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| Notes: |
The characteristics of argon electron cyclotron resonance plasma discharged by 7.0, 8.0, and 9.4 GHz microwaves were investigated. Experiments were conducted in a fixed magnetic field. It was found that the electron temperatures Te exhibited a trend of Te7.0〈Te8.0〈Te9.4 (suffixes represent the discharge microwave frequencies). © 2001 American Institute of Physics.
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| Type of Medium: |
Electronic Resource
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| URL: |