Experimental study of the hot and warm electron populations in an electron cyclotron resonance argon–oxygen–hydrogen plasma
Friedlein, R. ; Herpich, S. ; Hiller, H. ; Wirth, H. ; Zschornack, G. ; Tyrroff, H.
[S.l.] : American Institute of Physics (AIP)
Published 1995
[S.l.] : American Institute of Physics (AIP)
Published 1995
| ISSN: |
1089-7674
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| Source: |
AIP Digital Archive
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| Topics: |
Physics
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| Notes: |
Measurements of bremsstrahlung down to 7 keV emitted from a 7.25 GHz electron cyclotron resonance discharge and the deconvolution of the spectra using a newly developed integration method yield the exact electron distribution function. Two separate electron populations with temperatures about 3 and 25 keV and with densities about (0.2...4)108 cm−3 were recorded. First, results are obtained for the behavior of these populations belonging to the mixture (argon–oxygen–hydrogen). Gas mixing increases the densities of these populations, but hardly changes the temperatures. © 1995 American Institute of Physics.
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| Type of Medium: |
Electronic Resource
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| URL: |