Merkle, B. D., Kniseley, R. N., & Schmidt, F. A. (1987). A new system for vacuum deposition of refractory materials using an atmospheric-pressure inductively coupled plasma. American Institute of Physics (AIP).
Chicago Style (17th ed.) CitationMerkle, B. D., R. N. Kniseley, and F. A. Schmidt. A New System for Vacuum Deposition of Refractory Materials Using an Atmospheric-pressure Inductively Coupled Plasma. [S.l.]: American Institute of Physics (AIP), 1987.
MLA (9th ed.) CitationMerkle, B. D., et al. A New System for Vacuum Deposition of Refractory Materials Using an Atmospheric-pressure Inductively Coupled Plasma. American Institute of Physics (AIP), 1987.
Warning: These citations may not always be 100% accurate.