APA (7th ed.) Citation

Compaan, A., Abbi, S. C., Yao, H. D., Bhat, A., & Langer, D. W. (1987). Excimer and dye laser annealing of silicon-nitride-capped, Si-implanted GaAs. American Institute of Physics (AIP).

Chicago Style (17th ed.) Citation

Compaan, A., S. C. Abbi, H. D. Yao, A. Bhat, and D. W. Langer. Excimer and Dye Laser Annealing of Silicon-nitride-capped, Si-implanted GaAs. [S.l.]: American Institute of Physics (AIP), 1987.

MLA (9th ed.) Citation

Compaan, A., et al. Excimer and Dye Laser Annealing of Silicon-nitride-capped, Si-implanted GaAs. American Institute of Physics (AIP), 1987.