A novel test structure for grating pitch determination with near-Angstrom accuracy
Peckerar, M. C. ; Rhee, K. W. ; Ho, P.-T. ; Goldhar, J.
[S.l.] : American Institute of Physics (AIP)
Published 1990
[S.l.] : American Institute of Physics (AIP)
Published 1990
| ISSN: |
1089-7550
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|---|---|
| Source: |
AIP Digital Archive
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| Topics: |
Physics
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| Notes: |
This communication describes a novel double-grating test structure which enables grating pitch-difference determination with angstrom accuracy. Edge acuity can also be estimated. The test structure is easily fabricated and rapidly evaluated with inexpensive equipment generally found in microstructure laboratories.
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| Type of Medium: |
Electronic Resource
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| URL: |