Dynamical model of microscale electromechanical spatial light modulator
| ISSN: |
1089-7550
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| Source: |
AIP Digital Archive
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| Topics: |
Physics
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| Notes: |
A model based on classical physics describing the nonlinear dynamics of a microscale spatial light modulator has been developed. The coupled electromechanical equations of motion have been solved for steady-state, transient, and harmonic excitation. Comparison of theoretical predictions with the results of experiment for representative devices shows good agreement for small-amplitude deflections, large-amplitude deflections, and unstable transitions.
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| Type of Medium: |
Electronic Resource
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| URL: |