Background formation in the low-energy region in Auger electron spectroscopy

Ding, Z.-J. ; Shimizu, R. ; Goto, K.

[S.l.] : American Institute of Physics (AIP)
Published 1994
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Monte Carlo simulations of cascade processes of secondary electron generation in Si, Cu, and Au have been performed to study the energy distribution of backscattered electrons in the low-energy region. Calculation results show that the characteristic hump appearing in the energy distribution above Si-LVV Auger peak in the EN(E) spectrum can be well described by those electrons ejected from the L shell followed by the cascade process. The shape of EN(E) spectra in the low-energy region is dominated by the directly produced secondary electrons and, hence, strongly correlated with the excitation spectrum Im[−1/ε(ω)] for electron generation.
Type of Medium:
Electronic Resource
URL: