Background formation in the low-energy region in Auger electron spectroscopy
ISSN: |
1089-7550
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Source: |
AIP Digital Archive
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Topics: |
Physics
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Notes: |
Monte Carlo simulations of cascade processes of secondary electron generation in Si, Cu, and Au have been performed to study the energy distribution of backscattered electrons in the low-energy region. Calculation results show that the characteristic hump appearing in the energy distribution above Si-LVV Auger peak in the EN(E) spectrum can be well described by those electrons ejected from the L shell followed by the cascade process. The shape of EN(E) spectra in the low-energy region is dominated by the directly produced secondary electrons and, hence, strongly correlated with the excitation spectrum Im[−1/ε(ω)] for electron generation.
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Type of Medium: |
Electronic Resource
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URL: |