Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices

Wagner, J. ; Schmitz, J. ; Herres, N. ; Fuchs, F. ; Walther, M.

[S.l.] : American Institute of Physics (AIP)
Published 1998
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The pseudodielectric function of InAs/Ga1−xInxSb superlattices (SLs) grown by solid-source molecular-beam epitaxy, was measured by spectroscopic ellipsometry (SE) for photon energies ranging from 1.2 to 5 eV. The width of the extrema in the SL pseudodielectric function derived from the E1 and E1+Δ1 interband transitions of the SL constituents InAs and Ga1−xInxSb, was found to depend on the structural quality of the SL. Differences in the SL quality caused by different sequences of InSb- like and GaAs-like interfaces, were easily detected by SE. The formation of the intended interface alternations was verified by Raman spectroscopy. The extrema in the SL pseudodielectric function originating from the E1 and E1+Δ1 interband transitions of Ga1−xInxSb were found to shift to lower energies with increasing In content x. Finally SE has been applied to the analysis of a complete InAs/Ga1−xInxSb SL detector structure. © 1998 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
_version_ 1798289641300819968
autor Wagner, J.
Schmitz, J.
Herres, N.
Fuchs, F.
Walther, M.
autorsonst Wagner, J.
Schmitz, J.
Herres, N.
Fuchs, F.
Walther, M.
book_url http://dx.doi.org/10.1063/1.367376
datenlieferant nat_lic_papers
hauptsatz hsatz_simple
identnr NLZ218464304
issn 1089-7550
journal_name Journal of Applied Physics
materialart 1
notes The pseudodielectric function of InAs/Ga1−xInxSb superlattices (SLs) grown by solid-source molecular-beam epitaxy, was measured by spectroscopic ellipsometry (SE) for photon energies ranging from 1.2 to 5 eV. The width of the extrema in the SL pseudodielectric function derived from the E1 and E1+Δ1 interband transitions of the SL constituents InAs and Ga1−xInxSb, was found to depend on the structural quality of the SL. Differences in the SL quality caused by different sequences of InSb- like and GaAs-like interfaces, were easily detected by SE. The formation of the intended interface alternations was verified by Raman spectroscopy. The extrema in the SL pseudodielectric function originating from the E1 and E1+Δ1 interband transitions of Ga1−xInxSb were found to shift to lower energies with increasing In content x. Finally SE has been applied to the analysis of a complete InAs/Ga1−xInxSb SL detector structure. © 1998 American Institute of Physics.
package_name American Institute of Physics (AIP)
publikationsjahr_anzeige 1998
publikationsjahr_facette 1998
publikationsjahr_intervall 8004:1995-1999
publikationsjahr_sort 1998
publikationsort [S.l.]
publisher American Institute of Physics (AIP)
reference 83 (1998), S. 5452-5457
search_space articles
shingle_author_1 Wagner, J.
Schmitz, J.
Herres, N.
Fuchs, F.
Walther, M.
shingle_author_2 Wagner, J.
Schmitz, J.
Herres, N.
Fuchs, F.
Walther, M.
shingle_author_3 Wagner, J.
Schmitz, J.
Herres, N.
Fuchs, F.
Walther, M.
shingle_author_4 Wagner, J.
Schmitz, J.
Herres, N.
Fuchs, F.
Walther, M.
shingle_catch_all_1 Wagner, J.
Schmitz, J.
Herres, N.
Fuchs, F.
Walther, M.
Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices
The pseudodielectric function of InAs/Ga1−xInxSb superlattices (SLs) grown by solid-source molecular-beam epitaxy, was measured by spectroscopic ellipsometry (SE) for photon energies ranging from 1.2 to 5 eV. The width of the extrema in the SL pseudodielectric function derived from the E1 and E1+Δ1 interband transitions of the SL constituents InAs and Ga1−xInxSb, was found to depend on the structural quality of the SL. Differences in the SL quality caused by different sequences of InSb- like and GaAs-like interfaces, were easily detected by SE. The formation of the intended interface alternations was verified by Raman spectroscopy. The extrema in the SL pseudodielectric function originating from the E1 and E1+Δ1 interband transitions of Ga1−xInxSb were found to shift to lower energies with increasing In content x. Finally SE has been applied to the analysis of a complete InAs/Ga1−xInxSb SL detector structure. © 1998 American Institute of Physics.
1089-7550
10897550
American Institute of Physics (AIP)
shingle_catch_all_2 Wagner, J.
Schmitz, J.
Herres, N.
Fuchs, F.
Walther, M.
Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices
The pseudodielectric function of InAs/Ga1−xInxSb superlattices (SLs) grown by solid-source molecular-beam epitaxy, was measured by spectroscopic ellipsometry (SE) for photon energies ranging from 1.2 to 5 eV. The width of the extrema in the SL pseudodielectric function derived from the E1 and E1+Δ1 interband transitions of the SL constituents InAs and Ga1−xInxSb, was found to depend on the structural quality of the SL. Differences in the SL quality caused by different sequences of InSb- like and GaAs-like interfaces, were easily detected by SE. The formation of the intended interface alternations was verified by Raman spectroscopy. The extrema in the SL pseudodielectric function originating from the E1 and E1+Δ1 interband transitions of Ga1−xInxSb were found to shift to lower energies with increasing In content x. Finally SE has been applied to the analysis of a complete InAs/Ga1−xInxSb SL detector structure. © 1998 American Institute of Physics.
1089-7550
10897550
American Institute of Physics (AIP)
shingle_catch_all_3 Wagner, J.
Schmitz, J.
Herres, N.
Fuchs, F.
Walther, M.
Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices
The pseudodielectric function of InAs/Ga1−xInxSb superlattices (SLs) grown by solid-source molecular-beam epitaxy, was measured by spectroscopic ellipsometry (SE) for photon energies ranging from 1.2 to 5 eV. The width of the extrema in the SL pseudodielectric function derived from the E1 and E1+Δ1 interband transitions of the SL constituents InAs and Ga1−xInxSb, was found to depend on the structural quality of the SL. Differences in the SL quality caused by different sequences of InSb- like and GaAs-like interfaces, were easily detected by SE. The formation of the intended interface alternations was verified by Raman spectroscopy. The extrema in the SL pseudodielectric function originating from the E1 and E1+Δ1 interband transitions of Ga1−xInxSb were found to shift to lower energies with increasing In content x. Finally SE has been applied to the analysis of a complete InAs/Ga1−xInxSb SL detector structure. © 1998 American Institute of Physics.
1089-7550
10897550
American Institute of Physics (AIP)
shingle_catch_all_4 Wagner, J.
Schmitz, J.
Herres, N.
Fuchs, F.
Walther, M.
Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices
The pseudodielectric function of InAs/Ga1−xInxSb superlattices (SLs) grown by solid-source molecular-beam epitaxy, was measured by spectroscopic ellipsometry (SE) for photon energies ranging from 1.2 to 5 eV. The width of the extrema in the SL pseudodielectric function derived from the E1 and E1+Δ1 interband transitions of the SL constituents InAs and Ga1−xInxSb, was found to depend on the structural quality of the SL. Differences in the SL quality caused by different sequences of InSb- like and GaAs-like interfaces, were easily detected by SE. The formation of the intended interface alternations was verified by Raman spectroscopy. The extrema in the SL pseudodielectric function originating from the E1 and E1+Δ1 interband transitions of Ga1−xInxSb were found to shift to lower energies with increasing In content x. Finally SE has been applied to the analysis of a complete InAs/Ga1−xInxSb SL detector structure. © 1998 American Institute of Physics.
1089-7550
10897550
American Institute of Physics (AIP)
shingle_title_1 Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices
shingle_title_2 Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices
shingle_title_3 Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices
shingle_title_4 Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices
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titel Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices
titel_suche Spectroscopic ellipsometry for characterization of InAs/Ga1−xInxSb superlattices
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