Effects of stress relaxation of epitaxial SrRuO3 thin film on microstructures

Pan, X. Q. ; Jiang, J. C. ; Tian, W.

[S.l.] : American Institute of Physics (AIP)
Published 1999
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We report the effect of lattice stress relaxation on the microstructures of epitaxial thin films by domain structure studies of epitaxial SrRuO3 thin films grown on vicinal (001) SrTiO3 substrates. X-ray diffraction analysis revealed that the as-grown films are single domain and have a strained lattice due to the lattice mismatch with the substrate. In contrast, plan-view transmission electron microscopy (TEM) images obtained from the same films showed the coexistence of domains with three different crystallographic orientations. The discrepancy is attributed to the lattice stress relaxation occurring on the TEM specimens as the substrate material is eliminated by ion milling or etching, resulting in the formation of elastic domains with different crystallographic orientations. These studies directly reveal a crucial effect of the lattice strain relaxation on the microstructures and properties of epitaxial thin films when the substrate material is removed. © 1999 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
_version_ 1798289689706233857
autor Pan, X. Q.
Jiang, J. C.
Tian, W.
autorsonst Pan, X. Q.
Jiang, J. C.
Tian, W.
book_url http://dx.doi.org/10.1063/1.371345
datenlieferant nat_lic_papers
hauptsatz hsatz_simple
identnr NLZ218414072
issn 1089-7550
journal_name Journal of Applied Physics
materialart 1
notes We report the effect of lattice stress relaxation on the microstructures of epitaxial thin films by domain structure studies of epitaxial SrRuO3 thin films grown on vicinal (001) SrTiO3 substrates. X-ray diffraction analysis revealed that the as-grown films are single domain and have a strained lattice due to the lattice mismatch with the substrate. In contrast, plan-view transmission electron microscopy (TEM) images obtained from the same films showed the coexistence of domains with three different crystallographic orientations. The discrepancy is attributed to the lattice stress relaxation occurring on the TEM specimens as the substrate material is eliminated by ion milling or etching, resulting in the formation of elastic domains with different crystallographic orientations. These studies directly reveal a crucial effect of the lattice strain relaxation on the microstructures and properties of epitaxial thin films when the substrate material is removed. © 1999 American Institute of Physics.
package_name American Institute of Physics (AIP)
publikationsjahr_anzeige 1999
publikationsjahr_facette 1999
publikationsjahr_intervall 8004:1995-1999
publikationsjahr_sort 1999
publikationsort [S.l.]
publisher American Institute of Physics (AIP)
reference 86 (1999), S. 4188-4191
search_space articles
shingle_author_1 Pan, X. Q.
Jiang, J. C.
Tian, W.
shingle_author_2 Pan, X. Q.
Jiang, J. C.
Tian, W.
shingle_author_3 Pan, X. Q.
Jiang, J. C.
Tian, W.
shingle_author_4 Pan, X. Q.
Jiang, J. C.
Tian, W.
shingle_catch_all_1 Pan, X. Q.
Jiang, J. C.
Tian, W.
Effects of stress relaxation of epitaxial SrRuO3 thin film on microstructures
We report the effect of lattice stress relaxation on the microstructures of epitaxial thin films by domain structure studies of epitaxial SrRuO3 thin films grown on vicinal (001) SrTiO3 substrates. X-ray diffraction analysis revealed that the as-grown films are single domain and have a strained lattice due to the lattice mismatch with the substrate. In contrast, plan-view transmission electron microscopy (TEM) images obtained from the same films showed the coexistence of domains with three different crystallographic orientations. The discrepancy is attributed to the lattice stress relaxation occurring on the TEM specimens as the substrate material is eliminated by ion milling or etching, resulting in the formation of elastic domains with different crystallographic orientations. These studies directly reveal a crucial effect of the lattice strain relaxation on the microstructures and properties of epitaxial thin films when the substrate material is removed. © 1999 American Institute of Physics.
1089-7550
10897550
American Institute of Physics (AIP)
shingle_catch_all_2 Pan, X. Q.
Jiang, J. C.
Tian, W.
Effects of stress relaxation of epitaxial SrRuO3 thin film on microstructures
We report the effect of lattice stress relaxation on the microstructures of epitaxial thin films by domain structure studies of epitaxial SrRuO3 thin films grown on vicinal (001) SrTiO3 substrates. X-ray diffraction analysis revealed that the as-grown films are single domain and have a strained lattice due to the lattice mismatch with the substrate. In contrast, plan-view transmission electron microscopy (TEM) images obtained from the same films showed the coexistence of domains with three different crystallographic orientations. The discrepancy is attributed to the lattice stress relaxation occurring on the TEM specimens as the substrate material is eliminated by ion milling or etching, resulting in the formation of elastic domains with different crystallographic orientations. These studies directly reveal a crucial effect of the lattice strain relaxation on the microstructures and properties of epitaxial thin films when the substrate material is removed. © 1999 American Institute of Physics.
1089-7550
10897550
American Institute of Physics (AIP)
shingle_catch_all_3 Pan, X. Q.
Jiang, J. C.
Tian, W.
Effects of stress relaxation of epitaxial SrRuO3 thin film on microstructures
We report the effect of lattice stress relaxation on the microstructures of epitaxial thin films by domain structure studies of epitaxial SrRuO3 thin films grown on vicinal (001) SrTiO3 substrates. X-ray diffraction analysis revealed that the as-grown films are single domain and have a strained lattice due to the lattice mismatch with the substrate. In contrast, plan-view transmission electron microscopy (TEM) images obtained from the same films showed the coexistence of domains with three different crystallographic orientations. The discrepancy is attributed to the lattice stress relaxation occurring on the TEM specimens as the substrate material is eliminated by ion milling or etching, resulting in the formation of elastic domains with different crystallographic orientations. These studies directly reveal a crucial effect of the lattice strain relaxation on the microstructures and properties of epitaxial thin films when the substrate material is removed. © 1999 American Institute of Physics.
1089-7550
10897550
American Institute of Physics (AIP)
shingle_catch_all_4 Pan, X. Q.
Jiang, J. C.
Tian, W.
Effects of stress relaxation of epitaxial SrRuO3 thin film on microstructures
We report the effect of lattice stress relaxation on the microstructures of epitaxial thin films by domain structure studies of epitaxial SrRuO3 thin films grown on vicinal (001) SrTiO3 substrates. X-ray diffraction analysis revealed that the as-grown films are single domain and have a strained lattice due to the lattice mismatch with the substrate. In contrast, plan-view transmission electron microscopy (TEM) images obtained from the same films showed the coexistence of domains with three different crystallographic orientations. The discrepancy is attributed to the lattice stress relaxation occurring on the TEM specimens as the substrate material is eliminated by ion milling or etching, resulting in the formation of elastic domains with different crystallographic orientations. These studies directly reveal a crucial effect of the lattice strain relaxation on the microstructures and properties of epitaxial thin films when the substrate material is removed. © 1999 American Institute of Physics.
1089-7550
10897550
American Institute of Physics (AIP)
shingle_title_1 Effects of stress relaxation of epitaxial SrRuO3 thin film on microstructures
shingle_title_2 Effects of stress relaxation of epitaxial SrRuO3 thin film on microstructures
shingle_title_3 Effects of stress relaxation of epitaxial SrRuO3 thin film on microstructures
shingle_title_4 Effects of stress relaxation of epitaxial SrRuO3 thin film on microstructures
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timestamp 2024-05-06T08:04:49.980Z
titel Effects of stress relaxation of epitaxial SrRuO3 thin film on microstructures
titel_suche Effects of stress relaxation of epitaxial SrRuO3 thin film on microstructures
topic U
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