Choi, W. K., Feng, W., & Bera, L. K. (2001). Spectroscopic ellipsometry and electrical studies of as-grown and rapid thermal oxidized Si1−x−yGexCy films. American Institute of Physics (AIP).
Chicago Style (17th ed.) CitationChoi, W. K., W. Feng, and L. K. Bera. Spectroscopic Ellipsometry and Electrical Studies of As-grown and Rapid Thermal Oxidized Si1−x−yGexCy Films. [S.l.]: American Institute of Physics (AIP), 2001.
MLA (9th ed.) CitationChoi, W. K., et al. Spectroscopic Ellipsometry and Electrical Studies of As-grown and Rapid Thermal Oxidized Si1−x−yGexCy Films. American Institute of Physics (AIP), 2001.
Warning: These citations may not always be 100% accurate.