APA (7th ed.) Citation

Cheng, S. L., Lin, H. H., He, J. H., Chiang, T. F., Yu, C. H., & Chen, L. J. (2002). Evolution of structural order in germanium ion-implanted amorphous silicon layers. American Institute of Physics (AIP).

Chicago Style (17th ed.) Citation

Cheng, S. L., H. H. Lin, J. H. He, T. F. Chiang, C. H. Yu, and L. J. Chen. Evolution of Structural Order in Germanium Ion-implanted Amorphous Silicon Layers. [S.l.]: American Institute of Physics (AIP), 2002.

MLA (9th ed.) Citation

Cheng, S. L., et al. Evolution of Structural Order in Germanium Ion-implanted Amorphous Silicon Layers. American Institute of Physics (AIP), 2002.

Warning: These citations may not always be 100% accurate.