Reactive magnetron sputtering of thin-film superconductor YBa2Cu3O7−x
Char, K. ; Kent, A. D. ; Kapitulnik, A. ; Beasley, M. R. ; Geballe, T. H.
Woodbury, NY : American Institute of Physics (AIP)
Published 1987
Woodbury, NY : American Institute of Physics (AIP)
Published 1987
| ISSN: |
1077-3118
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|---|---|
| Source: |
AIP Digital Archive
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| Topics: |
Physics
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| Notes: |
Superconducting thin films of YBa2Cu3O7−x have been successfully made by co-sputtering from the three targets in an Ar and O2 mixture atmosphere. After high-temperature anneal films are superconducting with an onset temperature at 90 K, a full transition temperature as high as 88 K, and a critical current density in excess of 1×105 A/cm2 at 78 K and 2×106 A/cm2 at 4.2 K. Highly oriented thin films have been obtained on SrTiO3 {100} substrates.
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| Type of Medium: |
Electronic Resource
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| URL: |