High current Cu3P liquid metal ion source using a novel extractor configuration
Higuchi-Rusli, R. H. ; Corelli, J. C.
Woodbury, NY : American Institute of Physics (AIP)
Published 1987
Woodbury, NY : American Institute of Physics (AIP)
Published 1987
| ISSN: |
1077-3118
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|---|---|
| Source: |
AIP Digital Archive
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| Topics: |
Physics
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| Notes: |
It has been found that by utilizing a sharp needle for the extractor electrode in close proximity to the source tip wetted with Cu3P liquid alloy, a large increase (factor ∼300) in ion current is observed in comparison to standard liquid metal ion sources (LMIS's). In standard previously used LMIS's the extractor electrode was a flat plane with a circular hole centered on the source needle tip. This new high current source has important applications in focused and broad ion beam deposition systems.
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| Type of Medium: |
Electronic Resource
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| URL: |