Design of guided-wave components using growth of GaAs/AlGaAs superlattices on patterned substrates by organometallic chemical vapor deposition
Colas, E. ; Yi-Yan, A. ; Bhat, R. ; Seto, M. ; Deri, R. J.
Woodbury, NY : American Institute of Physics (AIP)
Published 1989
Woodbury, NY : American Institute of Physics (AIP)
Published 1989
ISSN: |
1077-3118
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Source: |
AIP Digital Archive
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Topics: |
Physics
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Notes: |
We demonstrate how an adequate choice of growth conditions and GaAs/AlGaAs superlattice series leads to a desired refractive index profile and to confinement of light at the cusp of a planarized structure over a previously photolithographically etched groove. Waveguiding at 1.52 μm wavelength with measured propagation losses of 1.5 dB/cm was obtained in these structures. The effect of growth parameters is discussed and potential applications of this concept to other structures suitable for guided-wave devices are proposed.
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Type of Medium: |
Electronic Resource
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URL: |