APA (7th ed.) Citation

Ashby, C. I. H., Myers, D. R., Vawter, G. A., & Biefeld, R. M. (1989). Carrier-lifetime control of photochemical dry etching using elevated impurity concentrations. American Institute of Physics (AIP).

Chicago Style (17th ed.) Citation

Ashby, C. I. H., D. R. Myers, G. A. Vawter, and R. M. Biefeld. Carrier-lifetime Control of Photochemical Dry Etching Using Elevated Impurity Concentrations. Woodbury, NY: American Institute of Physics (AIP), 1989.

MLA (9th ed.) Citation

Ashby, C. I. H., et al. Carrier-lifetime Control of Photochemical Dry Etching Using Elevated Impurity Concentrations. American Institute of Physics (AIP), 1989.