Nondisruptive oxide overlayer growth on GaAs(110)

Kroll, G. H. ; Ohno, T. R. ; Weaver, J. H.

Woodbury, NY : American Institute of Physics (AIP)
Published 1991
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Three different ways of forming oxide overlayers on GaAs(110) have been examined with x-ray photoemission. First, Cr atoms were deposited onto cleaved GaAs(110) at 300 K, producing a disrupted region over which Cr metal grew. Subsequent exposure to O2 resulted in an inhomogeneous overlayer with areas of thick Cr2O3-like oxides in addition to As and Ga oxides. GaAs oxidation was enhanced by Cr-induced surface disruption, but there was no evidence of a catalytic process. Second, metallic clusters of Cr containing hundreds of atoms were condensed onto GaAs(110). In this case, no substrate disruption was observed at low temperature. O2 exposure resulted in Cr2O3 formation with small amounts of Ga2O3 and no detectable As2O3. Third, Cr atoms and O2 molecules were condensed onto a Xe buffer layer on GaAs(110) to produce Cr2O3-like species out of contact with the semiconductor. Buffer layer desorption brought these Cr2O3 aggregates into contact with the substrate. The overlayer produced in this manner was abrupt, and there was no evidence of GaAs oxidation.
Type of Medium:
Electronic Resource
URL:
_version_ 1798289629813669889
autor Kroll, G. H.
Ohno, T. R.
Weaver, J. H.
autorsonst Kroll, G. H.
Ohno, T. R.
Weaver, J. H.
book_url http://dx.doi.org/10.1063/1.104941
datenlieferant nat_lic_papers
hauptsatz hsatz_simple
identnr NLZ218273053
issn 1077-3118
journal_name Applied Physics Letters
materialart 1
notes Three different ways of forming oxide overlayers on GaAs(110) have been examined with x-ray photoemission. First, Cr atoms were deposited onto cleaved GaAs(110) at 300 K, producing a disrupted region over which Cr metal grew. Subsequent exposure to O2 resulted in an inhomogeneous overlayer with areas of thick Cr2O3-like oxides in addition to As and Ga oxides. GaAs oxidation was enhanced by Cr-induced surface disruption, but there was no evidence of a catalytic process. Second, metallic clusters of Cr containing hundreds of atoms were condensed onto GaAs(110). In this case, no substrate disruption was observed at low temperature. O2 exposure resulted in Cr2O3 formation with small amounts of Ga2O3 and no detectable As2O3. Third, Cr atoms and O2 molecules were condensed onto a Xe buffer layer on GaAs(110) to produce Cr2O3-like species out of contact with the semiconductor. Buffer layer desorption brought these Cr2O3 aggregates into contact with the substrate. The overlayer produced in this manner was abrupt, and there was no evidence of GaAs oxidation.
package_name American Institute of Physics (AIP)
publikationsjahr_anzeige 1991
publikationsjahr_facette 1991
publikationsjahr_intervall 8009:1990-1994
publikationsjahr_sort 1991
publikationsort Woodbury, NY
publisher American Institute of Physics (AIP)
reference 58 (1991), S. 2249-2251
search_space articles
shingle_author_1 Kroll, G. H.
Ohno, T. R.
Weaver, J. H.
shingle_author_2 Kroll, G. H.
Ohno, T. R.
Weaver, J. H.
shingle_author_3 Kroll, G. H.
Ohno, T. R.
Weaver, J. H.
shingle_author_4 Kroll, G. H.
Ohno, T. R.
Weaver, J. H.
shingle_catch_all_1 Kroll, G. H.
Ohno, T. R.
Weaver, J. H.
Nondisruptive oxide overlayer growth on GaAs(110)
Three different ways of forming oxide overlayers on GaAs(110) have been examined with x-ray photoemission. First, Cr atoms were deposited onto cleaved GaAs(110) at 300 K, producing a disrupted region over which Cr metal grew. Subsequent exposure to O2 resulted in an inhomogeneous overlayer with areas of thick Cr2O3-like oxides in addition to As and Ga oxides. GaAs oxidation was enhanced by Cr-induced surface disruption, but there was no evidence of a catalytic process. Second, metallic clusters of Cr containing hundreds of atoms were condensed onto GaAs(110). In this case, no substrate disruption was observed at low temperature. O2 exposure resulted in Cr2O3 formation with small amounts of Ga2O3 and no detectable As2O3. Third, Cr atoms and O2 molecules were condensed onto a Xe buffer layer on GaAs(110) to produce Cr2O3-like species out of contact with the semiconductor. Buffer layer desorption brought these Cr2O3 aggregates into contact with the substrate. The overlayer produced in this manner was abrupt, and there was no evidence of GaAs oxidation.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_catch_all_2 Kroll, G. H.
Ohno, T. R.
Weaver, J. H.
Nondisruptive oxide overlayer growth on GaAs(110)
Three different ways of forming oxide overlayers on GaAs(110) have been examined with x-ray photoemission. First, Cr atoms were deposited onto cleaved GaAs(110) at 300 K, producing a disrupted region over which Cr metal grew. Subsequent exposure to O2 resulted in an inhomogeneous overlayer with areas of thick Cr2O3-like oxides in addition to As and Ga oxides. GaAs oxidation was enhanced by Cr-induced surface disruption, but there was no evidence of a catalytic process. Second, metallic clusters of Cr containing hundreds of atoms were condensed onto GaAs(110). In this case, no substrate disruption was observed at low temperature. O2 exposure resulted in Cr2O3 formation with small amounts of Ga2O3 and no detectable As2O3. Third, Cr atoms and O2 molecules were condensed onto a Xe buffer layer on GaAs(110) to produce Cr2O3-like species out of contact with the semiconductor. Buffer layer desorption brought these Cr2O3 aggregates into contact with the substrate. The overlayer produced in this manner was abrupt, and there was no evidence of GaAs oxidation.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_catch_all_3 Kroll, G. H.
Ohno, T. R.
Weaver, J. H.
Nondisruptive oxide overlayer growth on GaAs(110)
Three different ways of forming oxide overlayers on GaAs(110) have been examined with x-ray photoemission. First, Cr atoms were deposited onto cleaved GaAs(110) at 300 K, producing a disrupted region over which Cr metal grew. Subsequent exposure to O2 resulted in an inhomogeneous overlayer with areas of thick Cr2O3-like oxides in addition to As and Ga oxides. GaAs oxidation was enhanced by Cr-induced surface disruption, but there was no evidence of a catalytic process. Second, metallic clusters of Cr containing hundreds of atoms were condensed onto GaAs(110). In this case, no substrate disruption was observed at low temperature. O2 exposure resulted in Cr2O3 formation with small amounts of Ga2O3 and no detectable As2O3. Third, Cr atoms and O2 molecules were condensed onto a Xe buffer layer on GaAs(110) to produce Cr2O3-like species out of contact with the semiconductor. Buffer layer desorption brought these Cr2O3 aggregates into contact with the substrate. The overlayer produced in this manner was abrupt, and there was no evidence of GaAs oxidation.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_catch_all_4 Kroll, G. H.
Ohno, T. R.
Weaver, J. H.
Nondisruptive oxide overlayer growth on GaAs(110)
Three different ways of forming oxide overlayers on GaAs(110) have been examined with x-ray photoemission. First, Cr atoms were deposited onto cleaved GaAs(110) at 300 K, producing a disrupted region over which Cr metal grew. Subsequent exposure to O2 resulted in an inhomogeneous overlayer with areas of thick Cr2O3-like oxides in addition to As and Ga oxides. GaAs oxidation was enhanced by Cr-induced surface disruption, but there was no evidence of a catalytic process. Second, metallic clusters of Cr containing hundreds of atoms were condensed onto GaAs(110). In this case, no substrate disruption was observed at low temperature. O2 exposure resulted in Cr2O3 formation with small amounts of Ga2O3 and no detectable As2O3. Third, Cr atoms and O2 molecules were condensed onto a Xe buffer layer on GaAs(110) to produce Cr2O3-like species out of contact with the semiconductor. Buffer layer desorption brought these Cr2O3 aggregates into contact with the substrate. The overlayer produced in this manner was abrupt, and there was no evidence of GaAs oxidation.
1077-3118
10773118
American Institute of Physics (AIP)
shingle_title_1 Nondisruptive oxide overlayer growth on GaAs(110)
shingle_title_2 Nondisruptive oxide overlayer growth on GaAs(110)
shingle_title_3 Nondisruptive oxide overlayer growth on GaAs(110)
shingle_title_4 Nondisruptive oxide overlayer growth on GaAs(110)
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timestamp 2024-05-06T08:03:52.093Z
titel Nondisruptive oxide overlayer growth on GaAs(110)
titel_suche Nondisruptive oxide overlayer growth on GaAs(110)
topic U
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