APA (7th ed.) Citation

Yang, Y. H., Katiyar, M., Feng, G. F., Maley, N., & Abelson, J. R. (1994). Subsurface hydrogenated amorphous silicon to μc-hydrogenated silicon transformation during magnetron sputter deposition determined by spectroscopic ellipsometry. American Institute of Physics (AIP).

Chicago Style (17th ed.) Citation

Yang, Y. H., M. Katiyar, G. F. Feng, N. Maley, and J. R. Abelson. Subsurface Hydrogenated Amorphous Silicon to μc-hydrogenated Silicon Transformation During Magnetron Sputter Deposition Determined by Spectroscopic Ellipsometry. Woodbury, NY: American Institute of Physics (AIP), 1994.

MLA (9th ed.) Citation

Yang, Y. H., et al. Subsurface Hydrogenated Amorphous Silicon to μc-hydrogenated Silicon Transformation During Magnetron Sputter Deposition Determined by Spectroscopic Ellipsometry. American Institute of Physics (AIP), 1994.