Identification of phosphorus in diamond thin films using electron paramagnetic-resonance spectroscopy

Zvanut, M. E. ; Carlos, W. E. ; Freitas, J. A. ; Jamison, K. D. ; Hellmer, R. P.

Woodbury, NY : American Institute of Physics (AIP)
Published 1994
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
An electron paramagnetic-resonance study of diamond films doped by implantation of phosphorus during film deposition is reported. Samples with nominal phosphorus concentration between 1016 and 1017 cm−3 exhibit two isotropic lines of equal intensity separated by 27 G. The double-line spectrum is expected for a nuclear-spin 1/2 species such as phosphorus. The symmetry of the center and the temperature dependence of the spin concentration suggest that phosphorus forms a substitutional shallow donor in diamond. © 1994 American Institute of Physics.
Type of Medium:
Electronic Resource
URL: