Identification of phosphorus in diamond thin films using electron paramagnetic-resonance spectroscopy
Zvanut, M. E. ; Carlos, W. E. ; Freitas, J. A. ; Jamison, K. D. ; Hellmer, R. P.
Woodbury, NY : American Institute of Physics (AIP)
Published 1994
Woodbury, NY : American Institute of Physics (AIP)
Published 1994
| ISSN: |
1077-3118
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| Source: |
AIP Digital Archive
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| Topics: |
Physics
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| Notes: |
An electron paramagnetic-resonance study of diamond films doped by implantation of phosphorus during film deposition is reported. Samples with nominal phosphorus concentration between 1016 and 1017 cm−3 exhibit two isotropic lines of equal intensity separated by 27 G. The double-line spectrum is expected for a nuclear-spin 1/2 species such as phosphorus. The symmetry of the center and the temperature dependence of the spin concentration suggest that phosphorus forms a substitutional shallow donor in diamond. © 1994 American Institute of Physics.
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| Type of Medium: |
Electronic Resource
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| URL: |