Direct measurement of the refractive index change of silicon with optically injected carriers

1077-3118

AIP Digital Archive

Physics

Silicon phase modulators are important silicon optoelectronic devices. The relationship of the refractive index change with injected carrier concentration is the basis for the operation of silicon phase modulators. No direct experimental data of this relationship have been reported. We have developed a new method for the direct measurement of this relationship using a Fabry–Perot interference and optical injection of carriers. The experimental results of the refractive index change are reported for the first time in the range of injected carrier concentration between 1013 and 1015 cm−3. It should be noted that our experiment results are about 5 to 10 times larger than those predicted by theory. The reliability of our experiments is also discussed. © 1996 American Institute of Physics.

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