Imaging the irradiance distribution in the optical near field

Aizenberg, J. ; Rogers, J. A. ; Paul, K. E. ; Whitesides, G. M.

Woodbury, NY : American Institute of Physics (AIP)
Published 1997
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
This letter describes the use of a sensitive photoresist for direct imaging of optical intensity profiles in near-field photolithographic experiments. A comparison between experimental patterns in exposed, developed photoresist and calculated profiles of intensity shows that this procedure provides a reliable semiquantitative image of the irradiance distribution in the near field; experiment and theory correlate adequately. A potential use of the superficial diffraction contrast recorded in photoresist as the basis for a new method of the fabrication of nanostructures is discussed. © 1997 American Institute of Physics.
Type of Medium:
Electronic Resource
URL: