Stabilization of cubic CrN0.6 in CrN0.6/TiN superlattices
Yashar, P. ; Chu, X. ; Barnett, S. A.
Woodbury, NY : American Institute of Physics (AIP)
Published 1998
Woodbury, NY : American Institute of Physics (AIP)
Published 1998
| ISSN: |
1077-3118
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|---|---|
| Source: |
AIP Digital Archive
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| Topics: |
Physics
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| Notes: |
A transmission electron microscopy study of CrN0.6/TiN superlattices deposited by reactive magnetron sputtering is described. The stable structure of CrN0.60 is hexagonal, but high resolution transmission electron microscopy images of the superlattices showed that CrN0.6 layers ≤10 nm thick were cubic, while 50 nm thick layers were hexagonal. That is, the cubic CrN structure was "epitaxially stabilized" by the cubic TiN, with which there is a 2.4% lattice mismatch. The superlattices with hexagonal CrN0.6 showed high strains and defect densities within (approximate)5 nm of each interface, presumably due to the 5.4% volume decrease associated with the cubic-to-hexagonal transformation. The effect of this strain on the transformation is discussed. © 1998 American Institute of Physics.
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| Type of Medium: |
Electronic Resource
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| URL: |