Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon

ISSN:
0040-6090
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Physics
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1016/S0040-6090(05)80046-X
_version_ 1798291434973954048
autor Cong, Y.
An, I.
Collins, R.W.
Vedam, K.
Witham, H.S.
Pilione, L.J.
Messier, R.
autorsonst Cong, Y.
An, I.
Collins, R.W.
Vedam, K.
Witham, H.S.
Pilione, L.J.
Messier, R.
book_url http://dx.doi.org/10.1016/S0040-6090(05)80046-X
datenlieferant nat_lic_papers
fussnote Real-time spectroscopic ellipsometry has been developed for comprehensive optical characterization of vacuum-deposited thin films and their interfaces. A rotating-polarizer ellipsometer with multichannel detection was used to collect spectra at 15s intervals (about every 15A) during ion beam deposition of hydrogenated amorphous carbon (a-C:H) thin films on tantalum substrates. Each of the spectra consists of 80 pairs of ellipsometric angles {ψ(hν), Δ(hν)}, from 1.65 to 4.00 eV. A linear regression technique is introduced to analyze over 100 such spectra and to deduce the real and imaginary parts of the a-C: H dielectric function {ε"1, ε"2} and the film thickness vs. time within a three-medium model (Ta/a-C:H/ambient). As a result, a measure of the optical gap has been deduced, representing the first such determination from real-time data. A four-medium model, including a substrate-film interfacial layer, accounts for a discrepancy between the spectroscopic data and the three-medium model in the initial stage of a-C:H growth. An estimate of the thickness and {ε"1, ε"2} for the interface layer, from .12 spectra obtained in the first 180A of a-C:H growth on Ar^+-sputter-cleaned tantalum, completes a comprehensive optical analysis of thin film deposition.
hauptsatz hsatz_simple
identnr NLZ184989167
issn 0040-6090
journal_name Thin Solid Films
materialart 1
package_name Elsevier
publikationsort Amsterdam
publisher Elsevier
reference 193-194 (1990), S. 361-370
search_space articles
shingle_author_1 Cong, Y.
An, I.
Collins, R.W.
Vedam, K.
Witham, H.S.
Pilione, L.J.
Messier, R.
shingle_author_2 Cong, Y.
An, I.
Collins, R.W.
Vedam, K.
Witham, H.S.
Pilione, L.J.
Messier, R.
shingle_author_3 Cong, Y.
An, I.
Collins, R.W.
Vedam, K.
Witham, H.S.
Pilione, L.J.
Messier, R.
shingle_author_4 Cong, Y.
An, I.
Collins, R.W.
Vedam, K.
Witham, H.S.
Pilione, L.J.
Messier, R.
shingle_catch_all_1 Cong, Y.
An, I.
Collins, R.W.
Vedam, K.
Witham, H.S.
Pilione, L.J.
Messier, R.
Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
0040-6090
00406090
Elsevier
shingle_catch_all_2 Cong, Y.
An, I.
Collins, R.W.
Vedam, K.
Witham, H.S.
Pilione, L.J.
Messier, R.
Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
0040-6090
00406090
Elsevier
shingle_catch_all_3 Cong, Y.
An, I.
Collins, R.W.
Vedam, K.
Witham, H.S.
Pilione, L.J.
Messier, R.
Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
0040-6090
00406090
Elsevier
shingle_catch_all_4 Cong, Y.
An, I.
Collins, R.W.
Vedam, K.
Witham, H.S.
Pilione, L.J.
Messier, R.
Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
0040-6090
00406090
Elsevier
shingle_title_1 Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
shingle_title_2 Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
shingle_title_3 Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
shingle_title_4 Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
sigel_instance_filter dkfz
geomar
wilbert
ipn
albert
fhp
source_archive Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
timestamp 2024-05-06T08:32:34.345Z
titel Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
titel_suche Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon
Real-time spectroscopic ellipsometry has been developed for comprehensive optical characterization of vacuum-deposited thin films and their interfaces. A rotating-polarizer ellipsometer with multichannel detection was used to collect spectra at 15s intervals (about every 15A) during ion beam deposition of hydrogenated amorphous carbon (a-C:H) thin films on tantalum substrates. Each of the spectra consists of 80 pairs of ellipsometric angles {ψ(hν), Δ(hν)}, from 1.65 to 4.00 eV. A linear regression technique is introduced to analyze over 100 such spectra and to deduce the real and imaginary parts of the a-C: H dielectric function {ε"1, ε"2} and the film thickness vs. time within a three-medium model (Ta/a-C:H/ambient). As a result, a measure of the optical gap has been deduced, representing the first such determination from real-time data. A four-medium model, including a substrate-film interfacial layer, accounts for a discrepancy between the spectroscopic data and the three-medium model in the initial stage of a-C:H growth. An estimate of the thickness and {ε"1, ε"2} for the interface layer, from .12 spectra obtained in the first 180A of a-C:H growth on Ar^+-sputter-cleaned tantalum, completes a comprehensive optical analysis of thin film deposition.
topic U
uid nat_lic_papers_NLZ184989167