A novel delineation technique for 2D-profiling of dopants in crystalline silicon

Gong, L. ; Frey, L. ; Bogen, S. ; Ryssel, H.

Amsterdam : Elsevier

ISSN:	0168-583X
Source:	Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:	Physics
Type of Medium:	Electronic Resource
URL:	http://linkinghub.elsevier.com/retrieve/pii/0168-583X(93)95040-C