Ion mixing and backscattering effect in AES depth profiling

Ferron, J. ; Vidal, R.

Amsterdam : Elsevier

ISSN:	0169-4332
Source:	Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:	Physics
Type of Medium:	Electronic Resource
URL:	http://dx.doi.org/10.1016/0169-4332(86)90137-6