Nitrides of titanium, niobium, tantalum and molybdenum grown as thin films by the atomic layer epitaxy method
Hiltunen, L. ; Leskela, M. ; Makela, M. ; Niinisto, L. ; Nykanen, E. ; Soininen, P.
Amsterdam : Elsevier
Amsterdam : Elsevier
| ISSN: |
0040-6090
|
|---|---|
| Source: |
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
|
| Topics: |
Physics
|
| Type of Medium: |
Electronic Resource
|
| URL: |