Comparison of some physical properties of resistance-heat and electron-gun evaporated SiO films

Shimoda, R. ; Hsieh, E. ; Mayeda, K.

Amsterdam : Elsevier
ISSN:
0042-207X
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Physics
Type of Medium:
Electronic Resource
URL: