Synthesis and structural characterization of boron nitride thin films
Elena, M. ; Guzman, L. ; Calliari, L. ; Moro, L. ; Steiner, A. ; Miotello, A. ; Bonelli, M. ; Capelletti, R. ; Ossi, P.M.
Amsterdam : Elsevier
Amsterdam : Elsevier
| ISSN: |
0040-6090
|
|---|---|
| Keywords: |
Boron nitride ; Infrared spectroscopy ; Physical vapour deposition ; Structural properties
|
| Source: |
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
|
| Topics: |
Physics
|
| Type of Medium: |
Electronic Resource
|
| URL: |
| _version_ | 1798291425650016257 |
|---|---|
| autor | Elena, M. Guzman, L. Calliari, L. Moro, L. Steiner, A. Miotello, A. Bonelli, M. Capelletti, R. Ossi, P.M. |
| autorsonst | Elena, M. Guzman, L. Calliari, L. Moro, L. Steiner, A. Miotello, A. Bonelli, M. Capelletti, R. Ossi, P.M. |
| book_url | http://linkinghub.elsevier.com/retrieve/pii/0040-6090(94)90298-4 |
| datenlieferant | nat_lic_papers |
| fussnote | The purpose of this paper is to present first results of an investigation on the properties of boron-nitrogen thin films obtained by different deposition techniques. Films of different stoichiometries were produced on silicon substrates using r.f. magnetron sputtering and ion-beam-assisted deposition.In order to study the influence of the deposition process parameters on the film properties, the films were characterized by scanning electron microscopy. Auger electron spectroscopy, secondary neutral mass spectrometry, IR spectroscopy and nanoindentation.With the chosen experimental conditions, only hexagonal BN is formed. A considerable dependence of hardness of film microstructure has been evidenced. |
| hauptsatz | hsatz_simple |
| identnr | NLZ178613851 |
| issn | 0040-6090 |
| journal_name | Thin Solid Films |
| materialart | 1 |
| package_name | Elsevier |
| publikationsort | Amsterdam |
| publisher | Elsevier |
| reference | 253 (1994), S. 78-84 |
| schlagwort | Boron nitride Infrared spectroscopy Physical vapour deposition Structural properties |
| search_space | articles |
| shingle_author_1 | Elena, M. Guzman, L. Calliari, L. Moro, L. Steiner, A. Miotello, A. Bonelli, M. Capelletti, R. Ossi, P.M. |
| shingle_author_2 | Elena, M. Guzman, L. Calliari, L. Moro, L. Steiner, A. Miotello, A. Bonelli, M. Capelletti, R. Ossi, P.M. |
| shingle_author_3 | Elena, M. Guzman, L. Calliari, L. Moro, L. Steiner, A. Miotello, A. Bonelli, M. Capelletti, R. Ossi, P.M. |
| shingle_author_4 | Elena, M. Guzman, L. Calliari, L. Moro, L. Steiner, A. Miotello, A. Bonelli, M. Capelletti, R. Ossi, P.M. |
| shingle_catch_all_1 | Elena, M. Guzman, L. Calliari, L. Moro, L. Steiner, A. Miotello, A. Bonelli, M. Capelletti, R. Ossi, P.M. Synthesis and structural characterization of boron nitride thin films Boron nitride Infrared spectroscopy Physical vapour deposition Structural properties Boron nitride Infrared spectroscopy Physical vapour deposition Structural properties 0040-6090 00406090 Elsevier |
| shingle_catch_all_2 | Elena, M. Guzman, L. Calliari, L. Moro, L. Steiner, A. Miotello, A. Bonelli, M. Capelletti, R. Ossi, P.M. Synthesis and structural characterization of boron nitride thin films Boron nitride Infrared spectroscopy Physical vapour deposition Structural properties Boron nitride Infrared spectroscopy Physical vapour deposition Structural properties 0040-6090 00406090 Elsevier |
| shingle_catch_all_3 | Elena, M. Guzman, L. Calliari, L. Moro, L. Steiner, A. Miotello, A. Bonelli, M. Capelletti, R. Ossi, P.M. Synthesis and structural characterization of boron nitride thin films Boron nitride Infrared spectroscopy Physical vapour deposition Structural properties Boron nitride Infrared spectroscopy Physical vapour deposition Structural properties 0040-6090 00406090 Elsevier |
| shingle_catch_all_4 | Elena, M. Guzman, L. Calliari, L. Moro, L. Steiner, A. Miotello, A. Bonelli, M. Capelletti, R. Ossi, P.M. Synthesis and structural characterization of boron nitride thin films Boron nitride Infrared spectroscopy Physical vapour deposition Structural properties Boron nitride Infrared spectroscopy Physical vapour deposition Structural properties 0040-6090 00406090 Elsevier |
| shingle_title_1 | Synthesis and structural characterization of boron nitride thin films |
| shingle_title_2 | Synthesis and structural characterization of boron nitride thin films |
| shingle_title_3 | Synthesis and structural characterization of boron nitride thin films |
| shingle_title_4 | Synthesis and structural characterization of boron nitride thin films |
| sigel_instance_filter | dkfz geomar wilbert ipn albert fhp |
| source_archive | Elsevier Journal Backfiles on ScienceDirect 1907 - 2002 |
| timestamp | 2024-05-06T08:32:25.418Z |
| titel | Synthesis and structural characterization of boron nitride thin films |
| titel_suche | Synthesis and structural characterization of boron nitride thin films The purpose of this paper is to present first results of an investigation on the properties of boron-nitrogen thin films obtained by different deposition techniques. Films of different stoichiometries were produced on silicon substrates using r.f. magnetron sputtering and ion-beam-assisted deposition.In order to study the influence of the deposition process parameters on the film properties, the films were characterized by scanning electron microscopy. Auger electron spectroscopy, secondary neutral mass spectrometry, IR spectroscopy and nanoindentation.With the chosen experimental conditions, only hexagonal BN is formed. A considerable dependence of hardness of film microstructure has been evidenced. |
| topic | U |
| uid | nat_lic_papers_NLZ178613851 |