Si atomic layer epitaxy based on Si"2H"6 and remote He plasma bombardment
Mahajan, A. ; Irby, J. ; Kinosky, D. ; Qian, R. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Picraux, T.
Amsterdam : Elsevier
Amsterdam : Elsevier
| ISSN: |
0040-6090
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|---|---|
| Source: |
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
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| Topics: |
Physics
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| Type of Medium: |
Electronic Resource
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| URL: |