Simulation of high energy implantation profiles in crystalline silicon

Gong, L. ; Bogen, S. ; Frey, L. ; Jung, W. ; Ryssel, H.

Amsterdam : Elsevier

ISSN:	0167-9317
Source:	Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:	Electrical Engineering, Measurement and Control Technology
Type of Medium:	Electronic Resource
URL:	http://linkinghub.elsevier.com/retrieve/pii/0167-9317(92)90482-7