Optimization of Si epitaxial growth

Kosza, G. ; Kuznetsov, F.A. ; Kormany, T. ; Nagy, L.

Amsterdam : Elsevier

ISSN:	0022-0248
Source:	Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:	Chemistry and Pharmacology Geosciences Physics
Type of Medium:	Electronic Resource
URL:	http://linkinghub.elsevier.com/retrieve/pii/0022-0248(81)90195-0