Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth

Okuno, Y. ; Asahi, H. ; Kaneko, T. ; Kang, T.W. ; Gonda, S.-i.

Amsterdam : Elsevier
ISSN:
0022-0248
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Chemistry and Pharmacology
Geosciences
Physics
Type of Medium:
Electronic Resource
URL:
_version_ 1798290948405329920
autor Okuno, Y.
Asahi, H.
Kaneko, T.
Kang, T.W.
Gonda, S.-i.
autorsonst Okuno, Y.
Asahi, H.
Kaneko, T.
Kang, T.W.
Gonda, S.-i.
book_url http://linkinghub.elsevier.com/retrieve/pii/0022-0248(90)90358-R
datenlieferant nat_lic_papers
fussnote Surface diffusion of Ga molecules during the MOMBE (metalorganic molecular beam epitaxy) growth of GaAs using TEGa (triethylgallium) was studied by measuring the RHEED (reflection high energy electron diffraction) intensity oscillations on the (001) GaAs vicinal surface. It is found that the obtained diffusion constant values for the MOMBE growth are the same as those for the solid source MBE growth. It is also found that the damping speed of the RHEED intensity oscillation on the (001) surface depends on the flux ratio of TEGa to Ga when both beams are supplied on the surface. It is concluded that some of the incident TEGa molecules pyrolyze into Ga atoms and migrate on the surface, that the others migrate as Ga alkyl molecules and pyrolyze at the steps or kinks, and that the diffusion lengths of Ga alkyl molecules are longer than those of Ga atoms.
hauptsatz hsatz_simple
identnr NLZ177542926
issn 0022-0248
journal_name Journal of Crystal Growth
materialart 1
package_name Elsevier
publikationsort Amsterdam
publisher Elsevier
reference 105 (1990), S. 185-190
search_space articles
shingle_author_1 Okuno, Y.
Asahi, H.
Kaneko, T.
Kang, T.W.
Gonda, S.-i.
shingle_author_2 Okuno, Y.
Asahi, H.
Kaneko, T.
Kang, T.W.
Gonda, S.-i.
shingle_author_3 Okuno, Y.
Asahi, H.
Kaneko, T.
Kang, T.W.
Gonda, S.-i.
shingle_author_4 Okuno, Y.
Asahi, H.
Kaneko, T.
Kang, T.W.
Gonda, S.-i.
shingle_catch_all_1 Okuno, Y.
Asahi, H.
Kaneko, T.
Kang, T.W.
Gonda, S.-i.
Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth
0022-0248
00220248
Elsevier
shingle_catch_all_2 Okuno, Y.
Asahi, H.
Kaneko, T.
Kang, T.W.
Gonda, S.-i.
Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth
0022-0248
00220248
Elsevier
shingle_catch_all_3 Okuno, Y.
Asahi, H.
Kaneko, T.
Kang, T.W.
Gonda, S.-i.
Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth
0022-0248
00220248
Elsevier
shingle_catch_all_4 Okuno, Y.
Asahi, H.
Kaneko, T.
Kang, T.W.
Gonda, S.-i.
Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth
0022-0248
00220248
Elsevier
shingle_title_1 Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth
shingle_title_2 Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth
shingle_title_3 Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth
shingle_title_4 Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth
sigel_instance_filter dkfz
geomar
wilbert
ipn
albert
fhp
source_archive Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
timestamp 2024-05-06T08:24:50.570Z
titel Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth
titel_suche Surface diffusion lengths of Ga molecules during GaAs MOMBE (metalorganic molecular beam epitaxy) growth
Surface diffusion of Ga molecules during the MOMBE (metalorganic molecular beam epitaxy) growth of GaAs using TEGa (triethylgallium) was studied by measuring the RHEED (reflection high energy electron diffraction) intensity oscillations on the (001) GaAs vicinal surface. It is found that the obtained diffusion constant values for the MOMBE growth are the same as those for the solid source MBE growth. It is also found that the damping speed of the RHEED intensity oscillation on the (001) surface depends on the flux ratio of TEGa to Ga when both beams are supplied on the surface. It is concluded that some of the incident TEGa molecules pyrolyze into Ga atoms and migrate on the surface, that the others migrate as Ga alkyl molecules and pyrolyze at the steps or kinks, and that the diffusion lengths of Ga alkyl molecules are longer than those of Ga atoms.
topic V
TE-TZ
U
uid nat_lic_papers_NLZ177542926