An improved bilayer PMGI(1) lithographic process

Guibert, J.C. ; Chevalier, M. ; Paniez, P. ; Amblard, G.

Amsterdam : Elsevier

ISSN:	0167-9317
Source:	Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:	Electrical Engineering, Measurement and Control Technology
Type of Medium:	Electronic Resource
URL:	http://linkinghub.elsevier.com/retrieve/pii/0167-9317(87)90078-5