Depth profiling of iron impurities on GaAs surfaces using total reflection X-ray fluorescence
| ISSN: |
1432-1130
|
|---|---|
| Source: |
Springer Online Journal Archives 1860-2000
|
| Topics: |
Chemistry and Pharmacology
|
| Notes: |
Abstract.  Depth profiling of iron impurities on GaAs surfaces is performed by means of total reflection X-ray fluorescence. A numerical processing procedure presented previously is used for the evaluation of the experimental data. A detection limit of 1011 atoms Fe/cm2 on GaAs surfaces has been achieved.
|
| Type of Medium: |
Electronic Resource
|
| URL: |