Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method
| ISSN: |
1573-4811
|
|---|---|
| Source: |
Springer Online Journal Archives 1860-2000
|
| Topics: |
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
|
| Type of Medium: |
Electronic Resource
|
| URL: |
| _version_ | 1798296752355278848 |
|---|---|
| autor | Rożniatowski, K. Michalski, A. Kurzydlowski, K. J. |
| autorsonst | Rożniatowski, K. Michalski, A. Kurzydlowski, K. J. |
| book_url | http://dx.doi.org/10.1007/BF00591649 |
| datenlieferant | nat_lic_papers |
| hauptsatz | hsatz_simple |
| identnr | NLM194761916 |
| issn | 1573-4811 |
| journal_name | Journal of materials science |
| materialart | 1 |
| package_name | Springer |
| publikationsjahr_anzeige | 1996 |
| publikationsjahr_facette | 1996 |
| publikationsjahr_intervall | 8004:1995-1999 |
| publikationsjahr_sort | 1996 |
| publisher | Springer |
| reference | 15 (1996), S. 317-319 |
| search_space | articles |
| shingle_author_1 | Rożniatowski, K. Michalski, A. Kurzydlowski, K. J. |
| shingle_author_2 | Rożniatowski, K. Michalski, A. Kurzydlowski, K. J. |
| shingle_author_3 | Rożniatowski, K. Michalski, A. Kurzydlowski, K. J. |
| shingle_author_4 | Rożniatowski, K. Michalski, A. Kurzydlowski, K. J. |
| shingle_catch_all_1 | Rożniatowski, K. Michalski, A. Kurzydlowski, K. J. Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method 1573-4811 15734811 Springer |
| shingle_catch_all_2 | Rożniatowski, K. Michalski, A. Kurzydlowski, K. J. Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method 1573-4811 15734811 Springer |
| shingle_catch_all_3 | Rożniatowski, K. Michalski, A. Kurzydlowski, K. J. Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method 1573-4811 15734811 Springer |
| shingle_catch_all_4 | Rożniatowski, K. Michalski, A. Kurzydlowski, K. J. Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method 1573-4811 15734811 Springer |
| shingle_title_1 | Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method |
| shingle_title_2 | Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method |
| shingle_title_3 | Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method |
| shingle_title_4 | Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method |
| sigel_instance_filter | dkfz geomar wilbert ipn albert fhp |
| source_archive | Springer Online Journal Archives 1860-2000 |
| timestamp | 2024-05-06T09:57:05.291Z |
| titel | Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method |
| titel_suche | Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method |
| topic | ZL |
| uid | nat_lic_papers_NLM194761916 |