Comparison of Auger and SIMS analysis of a thin passive oxide film on iron - 25% chromium
ISSN: |
0142-2421
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Keywords: |
Chemistry ; Polymer and Materials Science
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Source: |
Wiley InterScience Backfile Collection 1832-2000
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Topics: |
Physics
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Notes: |
A comparison of three surface-analytical methods, viz: variable escape angle Auger electron spectroscopy, Auger sputter profiling and SIMS sputter profiling, is presented for a 1.8 nm-thick ‘passive’ oxide film on Fe-25% Cr alloy. The three techniques give identical results regarding the composition of the film as a function of depth. This means that with the proper choice of sputtering conditions (heavy ions of low energy), sputter mixing and sputter reduction are not a problem. It is evident from the experimental data that SIMS sputter profiling has the best depth resolution of the three techniques for such a thin film.
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Additional Material: |
2 Ill.
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Type of Medium: |
Electronic Resource
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URL: |