Molecular dynamics simulation of aluminum nitride deposition: temperature and N : Al ratio effects

Zhang, L., Yan, H., Zhu, G., Liu, S., Gan, Z.
Royal Society
Published 2018

Publication Date:	2018-08-16
Publisher:	Royal Society
Electronic ISSN:	2054-5703
Topics:	Natural Sciences in General
Keywords:	atomic and molecular physics
Published by:	http://royalsocietypublishing.org/