Features of the formation of non-vertical profiles on the surface of 4H-SiC by the reactive-ion etching
| Publication Date: |
2018-07-18
|
|---|---|
| Publisher: |
Institute of Physics (IOP)
|
| Print ISSN: |
1757-8981
|
| Electronic ISSN: |
1757-899X
|
| Topics: |
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
|
| Published by: |