HCl Flow-Induced Phase Change of α-, β-, and ε-Ga2O3 Films Grown by MOCVD
Haiding Sun, Kuang-Hui Li, C. G. Torres Castanedo, Serdal Okur, Gary S. Tompa, Tom Salagaj, Sergei Lopatin, Alessandro Genovese and Xiaohang Li
American Chemical Society (ACS)
Published 2018
American Chemical Society (ACS)
Published 2018
| Publication Date: |
2018-03-14
|
|---|---|
| Publisher: |
American Chemical Society (ACS)
|
| Print ISSN: |
1528-7483
|
| Electronic ISSN: |
1528-7505
|
| Topics: |
Chemistry and Pharmacology
Geosciences
Physics
|
| Published by: |